Vertical memory devices

ABSTRACT

In a semiconductor device, a stack of alternating gate layers and insulating layers is formed. Channel structures are formed in an array region of the stack. A first staircase is formed at a first section of the stack. A second staircase is formed at a second section of the stack. A dummy staircase is formed at the first section and disposed between the first staircase and the second staircase. The dummy staircase includes dummy group stair steps descending in a second direction parallel to a plane defined by any one of the gate layers and the insulating layers, and dummy division stair steps descending in a third direction and a fourth direction parallel to the plane and perpendicular to the second direction. The third direction and the fourth direction are opposite to each other.

RELATED APPLICATION

This application is continuation of U.S. patent application Ser. No.17/448,307 filed on Sep. 21, 2021, which is continuation of U.S. patentapplication Ser. No. 16/684,844 (now U.S. Pat. No. 11,171,154), filed onNov. 15, 2019, which is a bypass continuation of InternationalApplication No. PCT/CN2019/102332, filed on Aug. 23, 2019. The entirecontents of the above-identified applications are incorporated herein byreference in their entirety.

BACKGROUND

Semiconductor manufactures developed vertical device technologies, suchas three dimensional (3D) NAND flash memory technology, and the like toachieve higher data storage density without requiring smaller memorycells. In some examples, a 3D NAND memory device includes an arrayregion (also referred to as core region) and a staircase region. Thearray region includes a stack of alternating gate layers and insulatinglayers. The stack of alternating gate layers and insulating layers isused to form memory cells that are stacked vertically in the arrayregion. The staircase region includes the respective gate layers in thestair-step form to facilitate forming contacts to the respective gatelayers. The contacts are used to connect driving circuitry to therespective gate layers for controlling the stacked memory cells.

SUMMARY

Aspects of the disclosure provide a semiconductor device. Thesemiconductor device includes gate layers and insulating layers that areparallel to each other and are stacked alternatingly along a firstdirection and form a stack. The semiconductor device includes an arrayof channel structures that are formed in an array region of the stack.The array region can be arranged in a second direction perpendicular tothe first direction. Further, the semiconductor device includes a firststaircase formed at a first section in a connection region of the stack,and a second staircase formed at a second section in the connectionregion of the stack. The connection region can be arranged in the seconddirection. In addition, the semiconductor device includes a dummystaircase formed at the first section in the connection region of thestack and disposed between the first staircase and the second staircase.The dummy staircase can include dummy group stair steps descending inthe second direction, and dummy division stair steps descending in athird direction and a fourth direction that are perpendicular to thesecond direction and the first direction. The third direction and thefourth direction can be opposite to each other.

In some embodiments, the first staircase can be positioned over thesecond staircase, the first staircase can include first group stairsteps descending in the second direction and first division stair stepsdescending in the third direction and the fourth direction, and thesecond staircase can include second group stair steps descending in thesecond direction and second division stair steps descending in the thirddirection and the fourth direction. For example, a height difference oftwo consecutive first group stair steps of the first group stair stepsin the first direction can be equal to a height of N pairs of the gatelayers and the insulating layers in the first section, a heightdifference of two consecutive first division stair steps of the firstdivision stair steps in the first direction can be equal to a height ofone pair of the gate layer and the insulating layer in the firstsection, and the N can be greater than one. As another example, thedummy staircase can be a same height as the first staircase, and thedummy staircase can be positioned over the second staircase.

In some embodiments, a height difference of two consecutive second groupstair steps of the second group stair steps in the first direction canbe equal to a height of N pairs of the gate layers and the insulatinglayers in the second section, and a height difference of two consecutivesecond division stair steps of the second division stair steps in thefirst direction can be equal to a height of one pair of the gate layerand the insulating layer in the second section. For example,corresponding group stair steps of the first group stair steps in thefirst staircase and the second group stair steps in the second staircasecan be of a same height.

In some embodiments, a height difference of two consecutive dummy groupstair steps of the dummy group stair steps in the first direction can beequal to the height of the N pairs of the gate layers and the insulatinglayers in the first section.

In some embodiments, each first group stair step of the first groupstair steps can be formed of N first division stair steps and eachsecond group stair step of the second group stair steps is formed of Nsecond division stair steps.

In an embodiment, each of the first group stair steps can correspond toN respective first division stair steps, and each of the second groupstair steps can correspond to N respective second division stair steps.

In some embodiments, the semiconductor device can further include athird staircase formed of a third section in the connection region ofthe stack that corresponds to gate top select transistors in the channelstructures.

In some embodiments, the first section in the connection region of thestack and the second section in the connection region of the stack canhave a same number of gate layers.

In an embodiment, the semiconductor device can further include firstcontact structures formed on the first staircase, the first contactstructures being connected to the gate layers at the first section inthe connection region of the stack. In another embodiment, thesemiconductor device can further include second contact structuresformed on the second staircase, the second contact structures beingconnected to the gate layers at the second section in the connectionregion of the stack. In some embodiments, no contact structures areformed on the dummy staircase.

Aspects of the present disclosure also provide another semiconductordevice. For example, the semiconductor device can include gate layersand insulating layers that are parallel to each other and stackedalternatingly along a first direction and form a stack, an array ofchannel structures being formed in an array region of the stack, a firststaircase formed at a first section in a connection region of the stack,a second staircase formed at a second section in the connection regionof the stack, and first contact structures formed on the first staircaseand being connected to the gate layers at the first section in theconnection region of the stack. The array region can be arranged in asecond direction perpendicular to the first direction. The connectionregion can be arranged in the second direction. A first one and a secondone of the first contact structure can neighbor to each other in thesecond direction and have different lengths extending in the firstdirection. The first one and a third one of the first contact structurescan neighbor to each other in a third direction the second direction andthe first direction and have different lengths extending in the firstdirection.

In some embodiments, the semiconductor device can further include secondcontact structures formed on the second staircase and and beingconnected to the gate layers at the second section in the connectionregion of the stack. For example, first some of the first contactstructures arranged in a row in the third direction can be of a samenumber as second some of the first contact structures arranged in therow in the third direction, and third some of the first contactstructures arranged in a row in the fourth direction are of a samenumber as fourth some of the second contact structures arranged in therow in the fourth direction.

In some embodiments, the first one and a fourth one of the first contactstructures can neighbor to each other in a fourth directionperpendicular to the second direction and opposite to the thirddirection, and have different lengths extending in the first direction.In an embodiment, the third one and the fourth one of the first contactstructures can have the same length.

In some embodiments, the semiconductor device can further include adummy staircase formed at the first section and disposed between thefirst staircase and the second staircase.

In some embodiments, the first section in the connection region of thestack and the second section in the connection region of the stack canhave a same number of the gate layers.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 shows a top-down view of a semiconductor device according to someembodiments of the disclosure.

FIG. 2 shows a top-down view of a block portion in the semiconductordevice according to some embodiments of the disclosure.

FIG. 3 shows a cross-sectional view of the block portion according tosome embodiments of the disclosure.

FIG. 4 shows a close up view of a portion in the block portion accordingto some embodiments of the disclosure.

FIG. 5 shows a cross-sectional view of the portion according to someembodiments of the disclosure.

FIG. 6 shows a flow chart outlining a process example for fabricating asemiconductor device according to some embodiments of the disclosure.

FIG. 7 shows an example of a top-down view of the block portion of thesemiconductor device during fabrication according to some embodiments ofthe disclosure.

FIG. 8 shows an example of a top-down view of the block portion of thesemiconductor device during fabrication according to some embodiments ofthe disclosure.

FIG. 9 shows an example of a top-down view of the block portion of thesemiconductor device during fabrication according to some embodiments ofthe disclosure.

FIG. 10 shows an example of a top-down view of the block portion of thesemiconductor device during fabrication according to some embodiments ofthe disclosure.

FIG. 11 shows an example of a top-down view of the block portion of thesemiconductor device during fabrication according to some embodiments ofthe disclosure.

FIG. 12 shows an example of a cross-sectional view of the block portionof the semiconductor device during fabrication according to someembodiments of the disclosure.

FIG. 13 shows an example of a perspective view of the block portion ofthe semiconductor device during fabrication according to someembodiments of the disclosure.

FIG. 14 shows an example of a cross-sectional view of the block portionof the semiconductor device during fabrication according to someembodiments of the disclosure.

FIG. 15 shows an example of a perspective view of the block portion ofthe semiconductor device during fabrication according to someembodiments of the disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Three-dimensional (3D) semiconductor memory devices can be formed on asubstrate that includes an array region (also referred to as core regionin some examples) for forming an array of memory cells and a connectionregion for forming connections to the memory cells. For example, thememory cells are formed in the array region as an array of verticalmemory cell strings. The vertical memory cell strings are formed of gatelayers and insulating layers that are stacked alternatingly. At theconnection region, the stack of gate layers and the insulating layersare patterned into stair steps to provide contact pad regions forconnecting the gate layers of the memory cells to word lines.

According to some examples, trim-etch process is used to form stairsteps. The trim-etch process repetitively performs a trim step and anetch step based on a mask layer. During the trim step, the mask layer istrimmed to additionally expose a new step region on a stack ofalternatingly stacked (sacrificial) gate layers and insulating layers.During the etch step, the stack is etched based on the mask layer tocreate a new step. In some examples, the trim-etch process is performedusing reactive-ion etching and has a relatively low productivity, suchas a relatively low wafer per hour (WPH), and trim-etch process can behigh cost process for 3D memory device fabrication. In addition, whenthe number of stair steps is relatively large, to etch the lower stairsteps, the upper stair steps and the lower stair steps have relativelylarge height difference. Because of the large height difference, thickermask layer, such as thicker photoresist layer is required for thetrim-etch process for the lower stair steps, and the requirement ofthicker mask layer can cause, for example, difficulties in lithographyprocess.

Generally, stair steps are formed of treads and risers. In an example, atread is the part that is disposed horizontally between a top edge of alower riser and a bottom edge of an upper riser, and a riser is the partthat is disposed vertically between an inner edge of a lower tread andan outer edge of an upper tread. The tread is the part that can beconfigured into a contact pad for one or more contact structures to landon. The riser is the sidewall of a stack of layers, such asalternatingly disposed (sacrificial) gate layers and insulating layers.In some examples, a stair step is composed of a tread and a lower riserof the tread. The stair step is measured by depth and width of the treadand height of the lower riser. The depth of the tread is the distancefrom the outer edge to the inner edge of the tread. The width of thetread is the distance from one side of the tread to the other side. Theheight of the riser is the vertical distance of the sidewall between thelower tread and the current tread. In the present disclosure, the heightof the riser can be measured in term of layer pairs. For example, alayer pair is a thickness sum of a (sacrificial) gate layer and aninsulating layer. In some examples, when a stair step has a height ofmultiple layer pairs, such as four layer pairs, five layer pairs, sixlayer pairs, the stair step is referred to as a group stair step; when astair step has a height of one layer pair, the stair step is referred toas a division stair step.

According to some aspects of the disclosure, the stack of alternatinglydisposed gate layers and the insulating layers can be divided intosections. Each section of the stack is further divided into groups. Eachgroup is then divided into divisions. Each division includes a layerpair. In some embodiments, the stair steps to the different sections canbe formed at the same time (e.g., in the same trim-etch cycles), andthen chop processes are used to remove layers and shift stair steps ofthe different sections to the appropriate section layers. Thus, thetotal number of trim-etch cycles can be reduced. For example, when twosections are used, the total number of the trim-etch cycles can bereduced by half, and the height difference of the upper stair steps tothe lower stair steps in the trim-etch process can be reduced by halffor example. In another example, when three sections are used, the totalnumber of trim-etch cycles can be reduced by ⅔, the height difference ofthe upper stair steps to the lower stair steps in the trim-etch processcan be reduced by ⅔. Because the height difference of the upper stairsteps to the lower stair steps in the trim-etch process is reduced, thetrim-etch process can be performed with ease. Because the total numberof trim-etch cycles is reduced, the processing efficiency is improved.

FIG. 1 shows a top-down view of a semiconductor device 100 according tosome embodiments of the disclosure. The semiconductor device 100includes a memory portion 110 that are formed of three-dimensional (3D)memory cells. The memory portion 110 can include one or more memoryplanes 120, and each of memory planes 120 can include a plurality ofmemory blocks 130. In some examples, concurrent operations can takeplace at the memory planes 120. In some embodiments, each of the memoryblocks 130 is the smallest unit to carry out erase operations. In theFIG. 1 example, the memory portion 110 includes four memory planes 120and each of the memory planes 120 includes six memory blocks 130. Eachof the memory blocks 103 can include a plurality of memory cells, andeach memory cell can be addressed through interconnections, such as bitlines and word lines. In some examples, the bit lines and word lines canbe laid out perpendicularly, forming an array of metal lines. Forexample, the word lines extend in the X direction, and the bit linesextend in the Y direction.

Further, each memory block 130 can be divided into block portions 140according to stair division patterns. The block portions 140 haveidentical or equivalent stair division patterns. The details of theblock portions 140 will be described with reference to FIG. 2 -FIG. 5 .

It is noted that the semiconductor device 100 can be any suitabledevice, for example, memory circuits, a semiconductor chip (or die) withmemory circuits formed on the semiconductor chip, a semiconductor waferwith multiple semiconductor dies formed on the semiconductor wafer, astack of semiconductor chips, a semiconductor package that includes oneor more semiconductor chips assembled on a package substrate, and thelike.

It is also noted that, the semiconductor device 100 can include othersuitable circuitry (not shown), such as logic circuitry, powercircuitry, and the like that is formed on the same substrate, or othersuitable substrate, and is suitably coupled with the memory portion 110.Generally, the memory portion 110 includes the memory cells andperipheral circuitry (e.g., address decoder, driving circuits, senseamplifier and the like).

FIG. 2 shows a top-down view of a block portion 140 according to someembodiments of the disclosure, FIG. 3 shows a cross-sectional view ofthe block portion 140 at line A-A′, FIG. 4 shows a top down view ofdetails of a portion 245 in the block portion 140, and FIG. 5 shows across-sectional view of the portion 245 at line B-B′. In some examples,the top-down views in FIG. 2 and FIG. 4 are views in X-Y plane, thecross-sectional view in FIG. 3 is a view in X-Z plane, and thecross-sectional view in FIG. 5 is a view in Y-Z plane.

In the FIG. 2 and FIG. 3 example, the block portion 140 includesportions 240(A)-240(D) that have identical patterns or mirrored patternsfor stair divisions, and the portions 240(A)-240(D) are referred to asstair division pattern (SDP) portions 240(A)-(D). Each SDP portion 240includes an array region 250 and a connection region 260. The arrayregion 250 includes an array of memory strings 251 (as shown in FIG. 4), and each memory string 251 includes a plurality of stacked memorycells connected in series with one or more top select transistors andone or more bottom select transistors. The connection region 260includes a top select gate (TSG) connection region 261, a memory cellgate (MCG) connection region 269. The TSG connection region 261 includesa staircase structure and contact structures for connecting metal wiresto the gates of the top select transistors to control the top selecttransistors. The MCG connection region 269 includes staircase structuresand contact structures for connecting word lines to the gates of thememory cells.

It is noted that, the connection region 260 may also include a bottomselect gate (BSG) connection region (not shown) that includes astaircase structure and contact structures for connecting metal wires tothe gates of the bottom select transistors to control the bottom selecttransistors.

According to some aspects of the disclosure, the MCG connection region269 is configured according to a multi-level staircase architecture,such as a three-level staircase architecture. As shown in FIGS. 2-5example, each memory string 251 includes 108 memory cells, and thethree-level stair architecture can be used to provide connectionsbetween word lines and the gates of the 108 memory cells in each memorystring. For example, the 108 memory cells of a memory string 251 arereferred to, in a consecutive order, as M1-M108 with M1 being the firstmemory cell next to the top select transistors, and M108 being the lastone in the sequence. The 108 memory cells are divided into two sections,such as a first section of M1-M54 and a second section of M55-M108.Memory cells in each section are grouped into nine groups, and eachgroup includes six consecutive memory cells.

It is noted that, in some embodiments, the strings of memory cells in anarray are formed in a stack of alternatingly disposed gate layers andinsulating layers. The gate layers form gates of the top selecttransistors, the memory cells (such as M1-M108 in a string) and thebottom select transistor(s). In some contexts, M1-M108 are used to referto the gate layers (sometimes sacrificial gate layers) for thecorresponding memory cells.

Specifically, in some embodiments, the three-level staircasearchitecture includes a section level, a group level and a divisionlevel. At the section level, in the FIG. 2-5 example, the three-levelstaircase architecture includes a first staircase section 270 forproviding connections to the first section (S1) of M1-M54, and includesa second staircase section 290 for providing connections to the secondsection (S2) of M55-M108. At the group level, each staircase sectionincludes nine group stair steps G1-G9, and each group stair step has aheight of six layer pairs. At the division level, each group stair stepincludes 6 division stair steps D1-D6, and each division stair step hasa height of one layer pair. In some examples, the group stair stepsG1-G9 in each staircase section go up/down in a first direction, such asin X direction (or −X direction). Further, in some examples, divisionstair steps D1-D6 that go up/down in a second direction, such as Ydirection (or −Y direction) that is perpendicular to the firstdirection.

Additionally, in the FIGS. 2-5 example, the MCG connection region 269includes a dummy staircase section 280 that is disposed between thefirst staircase section 270 and the second staircase section 290.

In some embodiments, the first staircase section 270, the secondstaircase section 290 and the dummy staircase 280 are formed by the sametrim-etch process, thus the first and second staircase sections 270 and290 and the dummy staircase 280 are of similar group stair steps. Forexample, the section staircases 270 and 290 and the dummy staircase 280have the same number of group stair steps, and corresponding group stairsteps are of the same group stair step height and the same group stairstep depth. The first and second staircase sections 270 and 290 have thesame step-down direction, and the step-down direction of the dummystaircase 280 is the opposite direction of the step-down direction ofthe first and second staircase sections 270 and 290.

According to some aspects of the disclosure, a chop process is used toshift the second staircase section 290 down (e.g., −Z direction) toappropriate layers. In the FIGS. 2-5 example, the first staircasesection 270 and the dummy staircase section 280 are disposed with stairsteps formed in the layers for the memory cells M1-M54, and the secondstaircase section 290 is disposed with stair steps formed in the layersfor the memory cells M55-M108.

It is noted that, while in the FIGS. 2-5 example, the three-levelstaircase architecture includes two staircase sections, the number ofstaircase sections in the three-level staircase architecture should notbe limited and can be any suitable number, such as three, four, five andthe like. It is noted that, while in the FIGS. 2-5 example, eachstaircase section includes 9 group stair steps, the number of groupstair steps in a staircase section should not be limited and can be anysuitable number, such as six, seven, eight, ten and the like. It isnoted that, while in the FIGS. 2-5 example, each group stair stepincludes 9 division stair steps, the number of division stair steps in agroup stair step should not be limited and can be any suitable number,such as two, three, four, five, seven and the like.

In some embodiments, the gate-last fabrication technology is used, thusslit structures are formed to assist the removal of sacrificial gatelayers, and the formation of the real gates. In the FIGS. 2-5 example,slit structures 211, 212(A), 212(B), 213(A), 213(B) and 214 are formedin the SDP portion 240(C) as shown in FIG. 4 . The slit structures 211,212(A), 212(B), 213(A), 213(B) and 214 extend in the X direction, andparallel to each other. The slit structures 211 and 214 separate the SDPportion 240(C) from neighboring SDP portions 240(B) and 240(D) in anexample. The slit structures 212(A) and 213(A) are disposed in the arrayregion 250 and can divide the array of memory cell strings in the SDPportion 240(C) into three finger structures 241, 242 and 243. The slitstructures 212(B) and 213(B) are disposed in the connection region 260and can divide the connection region 260 into multiple portions.

In an example, the slit structures 211 and 214 are continuous slitstructures that are filled with insulating layers to electricallyinsulate the gate layers of the SDP portion 240(C) from neighboring SDPportions 240(B) and 240(D) for example.

In some examples, the number of the slit structures in connection region260 is same as the number of slit structures in the array region 250. Inthe FIGS. 2-5 example, the slit structures 212(B) and 213(B) are alignedwith the slit structures 212(A) and 213(A). However, the slit structures212(B) and 213(B) are broken from the slit structures 212(A) and 213(A)and are not continuous parts of the slit structures 212(A) and 213(A),thus the gate layers in the three fingers 241-243 are connected.

It is noted, in another example, the slit structures 212(B) and 213(B)are not aligned with the slit structures 212(A) and 213(A). In anotherexample, the number of slit structures in the connection region 260 isnot the same as the number of slit structures in the array region 250.

In some embodiments, at least some slit structures can function as thecommon source contact for an array of memory strings 251 in the arrayregions 250.

In the FIGS. 2-5 example, and as shown in FIG. 4 , top select gate cuts215 can be disposed in the middle of each finger portion to divide a topselect gate (TSG) layer of the memory finger into two portions, andthereby can divide a memory finger portion into two separatelyprogrammable (read/write) pages. While erase operation of a 3D NANDmemory can be carried out at memory block level, read and writeoperations can be carried out at memory page level. In some embodiments,dummy channel structures 222 can be disposed at suitable places forprocess variation control during fabrication and/or for additionalmechanical support.

It is noted that, in some examples, the top select gate cuts 215 do notcut the memory cell gate layers and the bottom select gate layers.

In the TSG connection region 261, a stair structure is formed. The stairstructure has multiple stair steps to expose a portion of gate layers ofthe top select transistors, and the exposed portions can be configuredas contact pads. Then, contact structures can be formed on the contactpads for connecting metal wires to the gates of the top selecttransistors to control the top select transistors. In the FIGS. 2-5example, and shown in FIG. 4 , the stair structure at the TSG connectionregion 261 has two stair steps 262 and 263. In an example, each of thetwo stair steps 262 and 263 has a height of one layer pair. In the FIG.2-5 example, the dashed lines show edges of treads. In an example, amemory string includes a first gate select transistor and a second gateselect transistor. The gate of the first gate select transistor isconnected with a contact structure 264 on the first stair step 262, andthe gate of the second gate select transistor is connected with acontact structure 265 on the second stair step 263.

Details of the first staircase section 270 are shown in FIG. 4 . Thefirst staircase section 270 exposes a portion of gate layers to thememory cells M1-M54 in each memory string 251 as contact pads, andcontact structures can be formed on the contact pads to connect the gatelayers of the memory cells M1-M54 in each memory string 251 to wordlines.

For example, the tread of division stair step D6 in the region of groupstair step G9 provides contact pad for M1. The tread of division stairstep D5 in the region of group stair step G9 provides contact pad forM2. The tread of division stair step D4 in the region of group stairstep G9 provides contact pad for M3. The tread of division stair step D3in the region of group stair step G9 provides contact pad for M4. Thetread of division stair step D2 in the region of group stair step G9provides contact pad for M5. The tread of division stair step D1 in theregion of group stair step G9 provides contact pad for M6.

Similarly, the tread of division stair step D6 in the region of groupstair step G8 provides contact pad for M7. The tread of division stairstep D5 in the region of group stair step G8 provides contact pad forM8. The tread of division stair step D4 in the region of group stairstep G8 provides contact pad for M9. The tread of division stair step D3in the region of group stair step G8 provides contact pad for M10. Thetread of division stair step D2 in the region of group stair step G8provides contact pad for M11. The tread of division stair step D1 in theregion of group stair step G8 provides contact pad for M12.

Similarly, the tread of division stair step D6 in the region of groupstair step G7 provides contact pad for M13. The tread of division stairstep D5 in the region of group stair step G7 provides contact pad forM14. The tread of division stair step D4 in the region of group stairstep G7 provides contact pad for M15. The tread of division stair stepD3 in the region of group stair step G7 provides contact pad for M16.The tread of division stair step D2 in the region of group stair step G7provides contact pad for M17. The tread of division stair step D1 in theregion of group stair step G7 provides contact pad for M18.

Similarly, the tread of division stair step D6 in the region of groupstair step G6 provides contact pad for M19. The tread of division stairstep D5 in the region of group stair step G6 provides contact pad forM20. The tread of division stair step D4 in the region of group stairstep G6 provides contact pad for M21. The tread of division stair stepD3 in the region of group stair step G6 provides contact pad for M22.The tread of division stair step D2 in the region of group stair step G6provides contact pad for M23. The tread of division stair step D1 in theregion of group stair step G6 provides contact pad for M24.

Similarly, the tread of division stair step D6 in the region of groupstair step G5 provides contact pad for M25. The tread of division stairstep D5 in the region of group stair step G5 provides contact pad forM26. The tread of division stair step D4 in the region of group stairstep G5 provides contact pad for M27. The tread of division stair stepD3 in the region of group stair step G5 provides contact pad for M28.The tread of division stair step D2 in the region of group stair step G5provides contact pad for M29. The tread of division stair step D1 in theregion of group stair step G5 provides contact pad for M30.

Similarly, the tread of division stair step D6 in the region of groupstair step G4 provides contact pad for M31. The tread of division stairstep D5 in the region of group stair step G4 provides contact pad forM32. The tread of division stair step D4 in the region of group stairstep G4 provides contact pad for M33. The tread of division stair stepD3 in the region of group stair step G4 provides contact pad for M34.The tread of division stair step D2 in the region of group stair step G4provides contact pad for M35. The tread of division stair step D1 in theregion of group stair step G4 provides contact pad for M36.

Similarly, the tread of division stair step D6 in the region of groupstair step G3 provides contact pad for M37. The tread of division stairstep D5 in the region of group stair step G3 provides contact pad forM38. The tread of division stair step D4 in the region of group stairstep G3 provides contact pad for M39. The tread of division stair stepD3 in the region of group stair step G3 provides contact pad for M40.The tread of division stair step D2 in the region of group stair step G3provides contact pad for M41. The tread of division stair step D1 in theregion of group stair step G3 provides contact pad for M42.

Similarly, the tread of division stair step D6 in the region of groupstair step G2 provides contact pad for M43. The tread of division stairstep D5 in the region of group stair step G2 provides contact pad forM44. The tread of division stair step D4 in the region of group stairstep G2 provides contact pad for M45. The tread of division stair stepD3 in the region of group stair step G2 provides contact pad for M46.The tread of division stair step D2 in the region of group stair step G2provides contact pad for M47. The tread of division stair step D1 in theregion of group stair step G2 provides contact pad for M48.

Similarly, the tread of division stair step D6 in the region of groupstair step G1 provides contact pad for M49, and a contact structure C1(shown in FIG. 5 ) is formed on the contact pad. The tread of divisionstair step D5 in the region of group stair step G1 provides contact padfor M50, and a contact structure C2 (shown in FIG. 5 ) is formed on thecontact pad. The tread of division stair step D4 in the region of groupstair step G1 provides contact pad for M51, and a contact structure C3(shown in FIG. 5 ) is formed on the contact pad. The tread of divisionstair step D3 in the region of group stair step G1 provides contact padfor M52, and a contact structure C4 (shown in FIG. 5 ) is formed on thecontact pad. The tread of division stair step D2 in the region of groupstair step G1 provides contact pad for M53, and a contact structure C5(shown in FIG. 5 ) is formed on the contact pad. The tread of divisionstair step D1 in the region of group stair step G1 provides contact padfor M54, and a contact structure C6 (shown in FIG. 5 ) is formed on thecontact pad.

It is noted that, in some examples, slit structures, such as shown bythe slit structures 211, 212(B), 213(B) and 214 in FIG. 5 are filledwith an insulating layer 530, and a conductive material 540. Theinsulating layer 530 insulates the conductive material 540 from the gatelayers. The conductive material 540 can be used for forming commonsource contact.

FIG. 6 shows a flow chart outlining a process example 600 forfabricating a semiconductor device, such as the semiconductor device 100according to some embodiments of the disclosure. The process starts atS601 and proceeds to S610.

At S610, sacrificial gate layers and insulating layers are stackedalternatingly on a substrate to form an initial stack. The substrate canbe any suitable substrate, such as a silicon (Si) substrate, a germanium(Ge) substrate, a silicon-germanium (SiGe) substrate, and/or asilicon-on-insulator (SOI) substrate. The substrate may include asemiconductor material, for example, a Group IV semiconductor, a GroupIII-V compound semiconductor, or a Group II-VI oxide semiconductor. TheGroup IV semiconductor may include Si, Ge, or SiGe. The substrate may bea bulk wafer or an epitaxial layer. In some examples, the insulatinglayers are made of insulating material(s), such as silicon dioxide, andthe like, and the sacrificial layers are made of silicon nitride.

At S620, stair steps to gates of the top select transistors are formed.The stair steps to the gates of the top select transistors can be formedby any suitable process. In an example, the stair steps to the gates ofthe top select transistors can be formed by applying a repetitiveetch-trim process using a mask layer. The details of a repetitiveetch-trim process will be described with reference to S630.

FIG. 7 shows an example of a top-down view of the block portion 140 ofthe semiconductor device 100 after the formation of the stair steps tothe gates of the top select transistors. As shown in FIG. 7 , stairsteps are formed in the TSG connection region 261.

Referring back to FIG. 6 , at S630, division stair steps of stairdivision patterns are formed in a connection region. In some examples, amask layer is used and trimming process is applied on the mask layer toform the etch masks for forming the division stair steps.

FIG. 8 shows an example of top-down view of the block portion 140 of thesemiconductor device 100 with SDP portions 240 (A)-(D) that are coveredby a mask layer 810. The mask layer 810 is used to form the divisionstair steps in the SDP portions 240 (A)-(D). The SDP portions 240(A)-(D) have identical SDP or mirrored SDP. The mask layer 810 coversthe array region 250 and a portion of the connection region 260 adjacentto the array region 250 and the TSG connection region 261. In someembodiments, the mask layer 810 can include a photoresist orcarbon-based polymer material, and can be formed using a patterningprocess such as lithography. In some embodiments, the mask layer 810 canalso include a hard mask, such as silicon oxide, silicon nitride, TEOS,silicon-containing anti-reflective coating (SiARC), amorphous silicon,or polycrystalline silicon. The hard mask can be patterned using etchingprocess such as reactive-ion-etching (RIE) using O2 or CF4 chemistry.Furthermore, the mask layer 810 can include any combination ofphotoresist and hard mask.

In some embodiments, the division stair steps can be formed by applyinga repetitive etch-trim process using the mask layer 810. The repetitiveetch-trim process includes multiple cycles of an etching process and atrimming process. During the etching process, a portion of the initialstack with exposed surface can be removed. In an example, the etch depthequals to a layer pair that is the thickness of a sacrificial gate layerand an insulating layer. In an example, the etching process for theinsulating layer can have a high selectivity over the sacrificial layer,and/or vice versa.

In some embodiments, the etching of the stack is performed by ananisotropic etching such as a reactive ion etch (RIE) or other dry etchprocesses. In some embodiments, the insulating layer is silicon oxide.In this example, the etching of silicon oxide can include RIE usingfluorine based gases such as carbon-fluorine (CF4), hexafluoroethane(C2F6), CHF3, or C3F6 and/or any other suitable gases. In someembodiments, the silicon oxide layer can be removed by wet chemistry,such as hydrofluoric acid or a mixture of hydrofluoric acid and ethyleneglycol. In some embodiments, a timed-etch approach can be used. In someembodiments, the sacrificial layer is silicon nitride. In this example,the etching of silicon nitride can include RIE using O2, N2, CF4, NF3,Cl2, HBr, BCl3, and/or combinations thereof. The methods and etchants toremove a single layer stack should not be limited by the embodiments ofthe present disclosure.

The trimming process includes applying a suitable etching process (e.g.,an isotropic dry etch or a wet etch) on the mask layer 810 such that themask layer 810 can be pulled back (e.g., shrink inwardly) laterally inthe x-y plane from edges. In some embodiments, the trimming process caninclude dry etching, such as RIE using O2, Ar, N2, etc. In someembodiments, a pull-back distance of the mask layer 810 corresponds tothe depth of a division stair step.

After trimming the mask layer 810, one portion of the topmost level ofthe initial stack corresponding to a division is exposed and the otherportion of the topmost level of the initial stack remains covered by themask layer 810. The next cycle of etch-trim process resumes with theetching process.

In some embodiments, the topmost level of the initial stack can becovered by an insulating layer. In some embodiments, the topmost levelof the initial stack can further be covered by other dielectricmaterials. A process step of removing the insulating layer and/or theother dielectric materials can be added to the etching process of eachetch-trim cycle to form the division stair steps.

After forming the division stair steps, the mask layer 810 can beremoved. The mask layer 810 can be removed by using techniques such asdry etching with O2 or CF4 plasma, or wet etching with resist/polymerstripper, for example solvent based chemicals.

FIG. 9 shows an example of top-down view of the block portion 140 in thesemiconductor device 100 after the mask layer 810 is removed. As shownin FIG. 9 , division stair steps D1-D6 are formed.

Referring back to FIG. 6 , at S640, group stair steps for the multiplestaircase sections, such as the first staircase section 270, the secondstaircase section 290 and the like, in the connection region are formedin the upper section layers, such as the layers for M1-M54. In someexamples, a mask layer is used and trimming process is applied on themask layer to form the etch masks for forming the group stair steps.

FIG. 10 shows an example of top-down view of the block portion 140 ofthe semiconductor device 100 that is covered by a mask layer 1010 thatis used to form the group stair steps. The mask layer 1010 is disposedover the array region 250 and a portion of the connection region 260. Asshown in FIG. 10 , the mask layer 1010 has a first portion 1010(A) and asecond portion 1010(B). The first portion 1010(A) covers the arrayregion 250 and a portion of the first staircase section 270, the secondportion 1010(B) covers a portion of the second staircase section 290 anda portion of the dummy staircase section 280. The mask layer 1010 can bemade of a similar material as the mask layer 810 and can be formed usinga similar technique.

In some embodiments, the group stair steps can be formed by applyingrepetitive etch-trim process using the mask layer 1010, similar to therepetitive etch-trim process to form the division stair steps. In thisexample, the group stair steps of the first staircase section 270 can beformed by trimming the left edge of the first portion 1010(A) in Xdirection. The group stair steps of the second staircase section 290 canbe formed by trimming the left edge of the second portion 1010(B) in Xdirection. The group stair steps of the dummy staircase section 280 canbe formed by trimming the right edge of the second portion 1010(B) in −Xdirection.

In some embodiments, each group stair step includes multiple layerpairs, such as 9 layer pairs in an example. Then, an etching processetches suitable layers corresponding to the height of a group stairstep, such as nine layer pairs of alternating sacrificial layers andinsulating layers.

After forming the group stair steps, the mask layer 1010 can be removed.The mask layer 1010 can be removed by using techniques such as dryetching with O2 or CF4 plasma, or wet etching with resist/polymerstripper, for example solvent based chemicals.

FIG. 11 shows an example of top-down view of the block portion 140 inthe semiconductor device 100 after the mask layer 1010 is removed. Thedashed lines show the edges of treads for the group stair steps. Asshown in FIG. 11 , group stair steps G1-G9 are formed.

FIG. 12 shows an example of a cross-sectional view of the block portion140 at line A-A′ after the mask layer 1010 is removed. FIG. 13 shows aperspective view of the block portion 140 after the mask layer 1010 isremoved. As shown in FIG. 12 and FIG. 13 , group stair steps G1-G9 ofthe first staircase section 270 and the second staircase section 290 areformed in the layers for M1-M54.

Referring back to FIG. 6 , at S650, a chop process is performed atdifferent staircase sections to shift the staircase sections to theappropriate section layers. In an example, the second staircase section290 is suitably exposed, and a chop process is performed to shift thesecond staircase section 290 to the layers for M55-M108. For example, amask layer is disposed to cover the semiconductor device 100, and thenthe portion of the mask layer that covers the second staircase section290 is suitably removed to expose the second staircase section 290.Then, etch process is performed to remove 54 layer pairs at the secondstaircase section 290.

In some embodiments, the etching of a lay pair (including an insulatinglayer and a sacrificial gate layer) at the second staircase section 290is performed by an anisotropic etching such as a reactive ion etch (RIE)or other dry etch processes. In some embodiments, the insulating layeris silicon oxide. In this example, the etching of silicon oxide caninclude RIE using fluorine based gases such as carbon-fluorine (CF4),hexafluoroethane (C2F6), CHF3, or C3F6 and/or any other suitable gases.In some embodiments, the silicon oxide layer can be removed by wetchemistry, such as hydrofluoric acid or a mixture of hydrofluoric acidand ethylene glycol. In some embodiments, a timed-etch approach can beused. In some embodiments, the sacrificial gate layer is siliconnitride. In this example, the etching of silicon nitride can include RIEusing O2, N2, CF4, NF3, Cl2, HBr, BCl3, and/or combinations thereof. Themethods and etchants to remove a single layer stack should not belimited by the embodiments of the present disclosure.

FIG. 14 shows an example of a cross-sectional view of the block portion140 at line A-A′ after the chop process and the mask layer is removed.FIG. 15 shows a perspective view of the block portion 140 after the chopprocess and the mask layer is removed. As shown in FIG. 14 and FIG. 15 ,group stair steps G1-G9 of the second staircase section 290 are shiftedin the layers for M55-M108.

It is noted that, when more than two sections are used, the chop processcan be repetitively used on other sections.

Referring back to FIG. 6 , at S660, channel structures are formed. In anexample, suitably planarization process is performed to obtain arelatively flat surface. Then, photo lithography technology is used todefine patterns of channel holes and dummy channel holes in photoresistand/or hard mask layers, and etch technology is used to transfer thepatterns into the stack of sacrificial layers and insulating layers.Thus, channel holes are formed in the array region 250 and the dummychannel holes are formed in the connection region.

Then, channel structures are formed in the channel holes, and dummychannel structures are formed in the dummy channel holes. In someembodiments, dummy channel structures can be formed with the channelstructures, thus the dummy channel structures are formed of the samematerials as the channel structures. In some embodiments, the dummychannel structures are formed differently from the channel structures.

At S670, gate line slits (also referred to as slit structures in someexamples) are formed. In some embodiments, the gate line slits areetched as trenches in the stack. In some examples, the gate line slitsin the connection region have the same pitch as the gate line slits inthe array region.

At S680, real gates are formed. In some embodiments, using the gate lineslits, the sacrificial layers can be replaced by the gate layers. In anexample, etchants to the sacrificial layers are applied via the gateline slits to remove the sacrificially layers. In an example, thesacrificial layers are made of silicon nitride, and the hot sulfuricacid (H₂SO₄) is applied via the gate line slits to remove thesacrificial layers. Further, via the gate line slits, gate stacks to thetransistors in the array region are formed. In an example, a gate stackis formed of a high-k dielectric layer, a glue layer and a metal layer.The high-k dielectric layer can include any suitable material thatprovide the relatively large dielectric constant, such as hafnium oxide(HfO₂), hafnium silicon oxide (HfSiO₄), hafnium silicon oxynitride(HfSiON), aluminum oxide (Al₂O₃), lanthanum oxide (La₂O₃), tantalumoxide (Ta₂O₅), yttrium oxide (Y₂O₃), zirconium oxide (ZrO₂), strontiumtitanate oxide (SrTiO₃), zirconium silicon oxide (ZrSiO₄), hafniumzirconium oxide (HfZrO₄), and the like. The glue layer can includerefractory metals, such as titanium (Ti), tantalum (Ta) and theirnitrides, such as TiN, TaN, W2N, TiSiN, TaSiN, and the like. The metallayer includes a metal having high conductivity, such as tungsten (W),copper (Cu) and the like.

At S690, further process(es) can be performed on the semiconductordevice. For example, the gate-last process continues to, for example,fill the gate line slits with spacer material (e.g., silicon oxide) andcommon source material (e.g., tungsten) to form the slit structure.Further, contacts structures can be formed and metal traces can beformed.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device, comprising: gate layers and insulating layers that are parallel to each other and stacked alternatingly along a first direction and form a stack; an array of channel structures being formed in an array region of the stack; a first staircase formed at a first section in a connection region of the stack, the connection region and the array region arranged in a second direction perpendicular to the first direction; a second staircase formed at a second section in the connection region of the stack; and a dummy staircase formed at the first section and disposed between the first staircase and the second staircase, the dummy staircase including dummy group stair steps descending in the second direction, and dummy division stair steps descending in a third direction and a fourth direction that are perpendicular to the second direction and the first direction and opposite to each other, wherein the first staircase includes first group stair steps descending in the second direction and first division stair steps descending in the third direction and the fourth direction.
 2. The semiconductor device of claim 1, wherein: the first staircase is positioned over the second staircase, and the second staircase includes second group stair steps descending in the second direction and second division stair steps descending in the third direction and the fourth direction.
 3. The semiconductor device of claim 1, wherein: a height difference of two consecutive first group stair steps of the first group stair steps in the first direction is equal to a height of N pairs of the gate layers and the insulating layers in the first section, and a height difference of two consecutive first division stair steps of the first division stair steps in the first direction is equal to a height of one pair of the gate layer and the insulating layer in the first section, the N being greater than one.
 4. The semiconductor device of claim 3, wherein: the dummy staircase has a same height as the first staircase, and the dummy staircase is positioned over the second staircase.
 5. The semiconductor device of claim 2, wherein: a height difference of two consecutive second group stair steps of the second group stair steps in the first direction is equal to a height of N pairs of the gate layers and the insulating layers in the second section, and a height difference of two consecutive second division stair steps of the second division stair steps in the first direction is equal to a height of one pair of the gate layer and the insulating layer in the second section.
 6. The semiconductor device of claim 5, wherein corresponding group stair steps of the first group stair steps in the first staircase and the second group stair steps in the second staircase are of a same height.
 7. The semiconductor device of claim 5, wherein a height difference of two consecutive dummy group stair steps of the dummy group stair steps in the first direction is equal to the height of the N pairs of the gate layers and the insulating layers in the first section.
 8. The semiconductor device of claim 5, wherein each first group stair step of the first group stair steps is formed of N first division stair steps and each second group stair step of the second group stair steps is formed of N second division stair steps.
 9. The semiconductor device of claim 5, wherein: each of the first group stair steps corresponds to N respective first division stair steps, and each of the second group stair steps corresponds to N respective second division stair steps.
 10. The semiconductor device of claim 1, further comprising: a third staircase formed of a third section in the connection region of the stack that corresponds to gate top select transistors in the channel structures.
 11. The semiconductor device of claim 1, wherein the first section in the connection region of the stack and the second section in the connection region of the stack have a same number of gate layers.
 12. The semiconductor device of claim 1, further comprising: first contact structures formed on the first staircase, the first contact structures being connected to the gate layers at the first section in the connection region of the stack.
 13. The semiconductor device of claim 12, further comprising: second contact structures formed on the second staircase, the second contact structures being connected to the gate layers at the second section in the connection region of the stack.
 14. The semiconductor device of claim 13, wherein no contact structures are formed on the dummy staircase.
 15. A semiconductor device, comprising: gate layers and insulating layers that are parallel to each other and stacked alternatingly along a first direction and form a stack; an array of channel structures being formed in an array region of the stack; a first staircase formed at a first section in a connection region of the stack, the connection region and the array region arranged in a second direction perpendicular to the first direction; a second staircase formed at a second section in the connection region of the stack; and first contact structures formed on the first staircase and being connected to the gate layers at the first section in the connection region of the stack, a first one and a second one of the first contact structures neighboring to each other in the second direction and having different lengths extending in the first direction, the first one and a third one of the first contact structures neighboring to each other in a third direction perpendicular to the second direction and the first direction and having different lengths extending in the first direction, wherein the first one and a fourth one of the first contact structures neighbor to each other in a fourth direction perpendicular to the second direction and the first direction and opposite to the third direction, and have different lengths extending in the first direction.
 16. The semiconductor device of claim 15, further comprising: second contact structures formed on the second staircase and being connected to the gate layers at the second section in the connection region of the stack, wherein first some of the first contact structures arranged in a row in the third direction are of a same number as second some of the second contact structures arranged in the row in the third direction, and third some of the first contact structures arranged in a row in the fourth direction are of a same number as fourth some of the second contact structures arranged in the row in the fourth direction.
 17. The semiconductor device of claim 15, wherein the third one and the fourth one of the first contact structures have a same length extending in the first direction.
 18. The semiconductor device of claim 15, further comprising: a dummy staircase formed at the first section and disposed between the first staircase and the second staircase.
 19. The semiconductor device of claim 15, wherein the first section in the connection region of the stack and the second section in the connection region of the stack have a same number of the gate layers.
 20. A semiconductor device, comprising: gate layers and insulating layers that are parallel to each other and stacked alternatingly along a first direction and form a stack; an array of channel structures being formed in an array region of the stack; a first staircase formed at a first section in a connection region of the stack, the connection region and the array region arranged in a second direction perpendicular to the first direction; a second staircase formed at a second section in the connection region of the stack; and a dummy staircase formed at the first section and disposed between the first staircase and the second staircase, the dummy staircase including dummy group stair steps descending in the second direction, and dummy division stair steps descending in a third direction and a fourth direction that are perpendicular to the second direction and the first direction and opposite to each other, wherein the dummy group stair steps of the dummy staircase face the first staircase, and the dummy staircase has a vertical sidewall that faces the second staircase and has a length in the first direction equal to a height of the dummy staircase in the first direction. 